The influence of modulation period and working pressure on structures and mechanical properties of the ZrC/ZrB2 multilayered films are analyzed by using XRD,SEM,profiler and nano indenter.

• 通过XRD,SEM和表面轮廓仪以及纳米力学测试系统,分析了调制周期和工作气压对多层膜生长结构和力学性能的影响。