The implementation of fluorine generation technology for chemical vapor deposition (CVD) chamber cleaning applications poses significant new challenges with regard to safety, reliability, purity and overall cost of ownership.

• 摘要对于将氟气应用在化学气相沉积器清洗的应用而言，其安全性、稳定性、纯度和价格，在应用上是一个新的挑战。