The good soft magnetic properties with Ms of 2223 emu/cc and Hc of 4 Oe wereobtained at the optimized parameters of P_(N2), RF-power and film thickness.

• 在实验条件的优化下得到了优良的软磁Fe-N薄膜,其饱和磁化强度为2223emu/cc,矫顽力为4 Oe。