The fluoroalkylsilane film was synthesized by using trimethylchlorosilane, fluosilicic acid and water as the precursors.The film was prepared by sol-gel process on glass substrates.

• 摘要采用溶胶-凝胶法，以三甲基氯硅烷、氢氟硅酸和水为先驱体，在玻璃基片上用提拉法制备出一种含有-CF3强疏水性基团的氯硅烷薄膜。