The experimental results demonstrate that this structure is desirable for application in power SIDs. Its advantages are high breakdown voltage and blocking gain.

• 实验结果表明该结构可用于制造各种功率静电感应器件 ；其优点是具有高的击穿电压和高的阻断增益 ；并讨论了平面型埋栅结构的主要特点和制造工艺 .