The equation of the ATP sensors sensitivity is introduced .The influence factors on the sensitivity of the ATP sensor are discussed .A sensors sensitivity is tested in laboratory.

• 推导了光束位置传感器的灵敏度公式；分析了影响光束位置传感器灵敏度的因素；并在实验室条件下测试了光束位置传感器的灵敏度。