The electroosmotic micropump is a novel pump which has the advantages of high pressure, a wide range of flow rate, simple structure and no moving part.

• 电渗驱动微泵是一种新型的微泵,具有输出压强高、流量可调范围宽、结构简单、无活动部件等特点,易与微通道热沉集成,构成微通道冷却系统,可用于集成电路的热管理。