The deformation control construction and measurement method of the lap are introduced.The dynamic response and emendation problem are explored, and the lap improvement is proposed.

• 简单介绍了抛光盘变形控制结构和面形检测机构,对深非球面度面形变形进行了精度分析,探讨了主动抛光盘的动态响应和校正,并对抛光盘的改造提出了一些建议。