The application of PVD is unceasingly spread in the recent years.The temperature of substrate further drops,and the new composite coatings and multilayered coatings are being developed.

• 近年来，物理气相沉积技术的应用对象不断扩展，处理时基体温度进一步降低，新型镀层、复合镀层、多层镀层大量出现，并通过制备工艺提高摩擦学性能。