The angular-dependent XPS showed the interspace distribution of different element is relatively uniformity.The mode of the chemistry combination of Si is SiO2.

• 角分辨X光电子能谱（angular-dependent XPS）分析薄膜表层元素的空间分布的结果表明，Si、O交替以Si-O-Si键结合而形成二维空间网络薄膜。