The angular distributions of sputtered Al and Sn atoms ejected from the Al-Sn multi phase alloy bombarded by 30keV Ar+ ion have been measured with collector technique and RBS analysis.

• 用捕获膜技术和卢瑟福背散射(RBS)分析,测定Al-Sn多相合金在30keV Ar~+离子轰击时Al和Sn的溅射原子角分布。