The Study of the Bi-Layered Ferroelectric Thin Films Structure of High Breakdown Voltage and Low Leakage Current , and the Fabrication of Memory Devices.

 
  • 高介电薄膜材料及应用---靶材之提供与测试系统之建立---高耐压低漏电流双层铁电薄膜及记忆体元件之制造
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