The FZO films will desorb corresponding to low boundstrength even heated at 100oC.Instead of layer by layer desorption, the FZO films showmultilayer desorption based on Polany Wigner equation.

• 氧化锌掺杂氟化镁薄膜加热100oC就会产生对应低束缚能的脱附，此脱附行为依据保罗尼维格方程式属于多层膜而非一层接一层的脱附。