The AlN thin film on Mo substrate shows weak c-axis crystallinity due to the poor surface roughness and low crystallinity of Mo electrodes.

• 实验结果显示在钼上沉积的氮化铝的结晶度最差，可能的是因为钼金属的表面粗糙度大且钼本身薄膜的结晶度差的缘故；