Surface morphologies of the films were investigated by AFM and SEM, which also show the high c-axis orientation of grains with average size about 50~100 nm.

• SEM及AFM显示薄膜表面致密、均匀、光滑,组成薄膜的颗粒尺寸在50~100nm,并显示出良好的C轴择优取向。