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- Research of Measurement and Measuring Error of Laser Interferometer in Step Imprint Lithography 基于分步式压印光刻的激光干涉仪纳米级测量及误差研究
- Step imprint lithography 分步式压印光刻
- Aiming at the lost accuracy happened in HEL(hot embossing lithography) because of thermal distortion ,room-temperature imprint lithography is proposed. 针对热压印光刻工艺中因热变形而导致精度丧失的问题,提出了冷压印光刻。
- An ultra-precision alignment technique adopting a pair of special slant gratings was presented for room-temperature imprint lithography. 为满足多层冷压印光刻中套刻的超高精度要求,提出了基于斜纹结构光栅的对正技术。
- Due to the diffracting limitation of the photolithography, imprint lithography technology, which maybe next generation lithography technology, is described. 针对微纳制造中光刻环节的光衍射限制,讨论了可能成为下一代光刻技术路线的压印光刻。
- Considering that step-by-step imprint lithography process is used in practice commonly，the corresponding alignment marks in every subarea are designed. 考虑到实际中通常采用分区步进压印工艺，因此在基片上的每一个压印分区都设计有相应的对准标记。
- A Novel Two-Step Alignment Technique for Imprint Lithography 压印光刻中的两步对正技术
- Study on the ultra-high resolution imprint lithography 高分辨率常温压印光刻工艺研究
- Design and Optimization of Resist Film in Imprint Lithography Alignment Process 压印光刻对准中阻蚀胶层的设计及优化
- He bounced into the room with a springy step. 他以轻快的跑步跳进房间。
- Her face bore the deep imprint of suffering. 她的脸上带着受过苦难的深深的痕迹。
- Modeling of Thermally Induced Error for High-Precision Step Imprint Tool 高精度步进压印机热误差的建模分析
- I hope my ideas are in step with public opinion. 我希望我的想法跟公众舆论是一致的。
- His head left an imprint on the pillow. 他的头在枕上留下印痕。
- Her speech left its imprint on me. 她的演讲给我留下了深刻印象。
- She runs up the stairs with a light graceful step. 她以轻快优雅的步子奔上楼去。
- I hope you try to get them to step up production. 希望你们尽力使厂家增加生产。
- Thermally Induced Error Analysis for the Imprint Spindle of High-Precision Imprint Lithography Tools 高精度压印机压印轴的热误差分析
- Step on it or we'll miss the beginning of the show. 赶快，要不然我们会赶不上演出的。
- In batch or remote batch entry, a job or job step. 在批处理或远程批处理输入中的一个作业或作业步。
