Production methods and processing of trichlorosilane are introduced, layout and lifting scheme of main equipment are described, characteristics of the three schemes are compared.

• 介绍了三氯氢硅的生产方法及工艺流程,叙述了装置设计中主要设备布置及吊装方案的确定过程,并对3种方案的特点进行了比较。