PZT film is widely applied to the fields of microelectronics and optoelectronics, integrated photics and MEMS etc. And the characteristics of PZT film-high sensitive and high output strain make it a most promising material of drive devices in MEMS.

• PZT薄膜广泛应用于微电子学、光电子学、集成光学和微电子机械系统等领域,特别是PZT压电薄膜作为微传感及驱动器件应用时的高灵敏度和高输出应变的特点,使其成为微机电系统(MEMS)最有前途的候选材料。