Output errors of power amplifiers, hysteresis and creep error of PZTs and coupling error among the actuators are the critical factors affecting the motion accuracy of Improvement.

• 摘要功率放大器的输出误差、压电陶瓷的洄滞及蠕变误差、驱动器之间的耦合误差等是影响机器人运动精度的关键因素。