On the optical frame, the use of light division system and polarized optical components improve the head-to-scale tolerance substantially and produce four interference quadrature signals.

 
  • 光学架构上,本光学尺利用分光系统以及偏极光学元件,能大幅提高光栅与光学头间之对位公差,并获得四正交之光学干涉讯号。
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