Micro Electro-Mechanical System, as a newly developed cross-field subject, is the study of focal point of the future world science with a very broad application foreground.

• 微机电系统(Micro Electro-Mechanical System, MEMS)是目前一个新兴的学科交叉领域,具有非常广阔的应用前景,是未来世界科学的研究重点。