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- RF MEMS technology becomes more and more attractive in the communicationfield nowadays. 射频微电子机械系统(RF MEMS)技术在现代通信领域中越来越受到重视。
- The electrophoretic microchip fabricated by MEMS technology is successfully used to finish the electrophoresis process. 摘要微芯片电泳是基于微机电加工技木(MEMS)工艺,在芯片上的微管道中完成电泳检测过程的新型技术。
- Then, communication devices based on MEMS technology and their applications are reviewed. 重点综述了基于MEMS技术的通信器件及其应用。
- MEMS technology is an outgrowth of the highly sophisticated semiconductor industry. MEMS技术的增长超过了已经非常先进的半导体工业。
- The fabrication and simulation of an electromagnetic microrelay based on MEMS technology are presented. 介绍一种基于MEMS技术的微型电磁继电器的制造工艺和仿真过程。
- The MEMS technology can be used to minify camera circuit and transmitting circuit board.So the size of the capsule can be reduced largely. 利用MEMS技术可以大大缩小摄像电路和发射电路的尺寸,从而大大缩小摄像药丸的体积。
- MEMS technology is a new emerging technology, which introjects the microelectronic technology and the precision machine machining technology. 微机电系统(MEMS)技术是一门新兴的技术,它将微电子技术和精密机械加工技术融合在一起,实现了微电子与机械的融为一体。
- In recent years, the research and development of micro-inertial sensors based on MEMS technology has received wide attention. 近年来,基于MEMS(微机电系统)技术的微惯性传感器的研究与发展受到了广泛的重视。
- With the rapid development of MEMS technology, micro-fluids technology has been becoming one of the hot research domains of MEMS step by step. 伴随微电子机械系统的发展,微流体技术成为微电子机械领域研究的热门。
- The key technics in the solidification of sensitive films and processing sensors chips using MEMS technology are introduced. 介绍了采用MEMS技术加工传感器芯片和敏感膜固定化的关键工艺;
- This paper presented design,simulation,manufacturing and experiments of a novel micro nebulizer based on MEMS technology. 介绍了一种基于MEMS技术的雾化微喷的设计、仿真、加工和实验结果。
- One package method of LED chip based on MEMS technology is proposed, a reflector formed by hulk silicon etching is used for LED chip. 本文提出了一种基于MEMS的LED芯片封装技术,利用体硅工艺在硅基上形成的凹槽作为封装LED芯片的反射腔。
- On the other hand, pyroelectric detector has a faster response and become more sensitive supported by MEMS technology and IRFPA technology. 同时由于MEMS工艺技术和红外焦平面(IR-FPA)技术的发展,使得热释电红外探测器具有更快的响应和更高的灵敏度。
- Based on MEMS technology, a micro three -electrode system including an Au working electrode, a Pt counter electrode and a Pt pseudo-reference electrode was produced. 采用MEMS技术,在硅片上制备了分别以Au、Pt、Pt为电极材料的工作电极、对电极以及准参比电极的微型三电极系统。
- It introduced the importance of the MEMS technology as well as its trend in development and the brief situations in application about small satellite or micro-satellite. 介绍了MEMS技术的重要性及在微小卫星及微卫星上的应用情况和发展趋势。
- The new type piezoelectrically actuated mesh nebulizers based on MEMS technology have advantages such as fine droplets, much greater efficiency, low power etc. 摘要新型的压电致动网孔式雾化器基于微机械加工技术,具有雾滴直径小,功率小,效率高等优点。
- The MEMS technology and its main characteristics are briefly described, and then its application in uncooled infrared detector is introduced in details. 本文简要介绍了MEMS技术的工艺及其主要特点,幷对MEMS技术在非制冷红外探测器研制方面的应用作了比较详细的阐述。
- At present,there are two micro structure maded by MEMS technology:microbridge in the microbolometer FPA and bimaterial microcantilever of microcantilever detector. 目前,应用MEMS技术制作的主要有微测辐射热计微桥结构和微悬臂红外探测器双层悬臂结构2种。
- MEMS technology used in the adaptive optics will bring an important influence. Based on this purpose some novel deformable mirrors were discussed in the theory and fabrication process. 摘要将MEMS技术用于自适应光学系统具有重大意义。本文从原理及制作工艺上论述了几种新型的可变形反射镜,为下一步的深入研究打下基础。
- The problems of process design should be solved in MEMS design, it has an important role in raising the level of MEMS technology through the study about simulation towards the key MEMS process technology based on MEMS CAD software. 在MEMS设计中需要解决工艺设计的问题,基于MEMS CAD软件对MEMS关键加工工艺进行仿真研究,对于MEMS工艺水平的提高有着重要的意义。