Keywords copolymer of acrylamide and diacetone acrylamide;polyvinylpyrrolidone;water-soluble negative photoresist;

• 丙烯酰胺-双丙酮丙烯酰胺共聚物;聚乙烯吡咯烷酮;水溶性负性光致抗蚀剂;