Its application to PHI-550 ESCA/SAM system for data treatment of various XPS spectra shows merits of high computing speed, simplicity and convenience with reliable results.

• 它在PHI-550 ESCA/SAM电子能谱仪上处理各种XPS谱具有运算低、使用方便的优点,结果表明该软件可以成功地应用于XPS谱图的解析。