It was shown that the crystalline volume fraction of p-Si:H films on SnO2 is higher than those on ZnO:Al and SnO2/ZnO:Al,and the cluster size of p-Si:H films on SnO2 is also larger.

• 结果表明:在SnO2上沉积的p-Si:H膜的晶化率较其它两种衬底高,相应的SEM形貌显示颗粒尺寸也较大。