It was shown a linear relation between polishing and polishing pressures and rotative rates within some range, non_linear relation between polishing and various reagent concentrations. Preston coefficient was varied.

• 实验表明了在一定范围内抛光速率与抛光压力及抛光转速呈线性关系 ；组分浓度对抛光速率的影响为非线性关系 ；Preston系数Kp是变量 .