It was indicated by SEM spectra of ZnO thin films that the surface of the sample was leveled off, and the crystals were felsitic.

• 结果表明，对于ITO薄膜，薄膜的光电性能薄膜结构的择优取向性和与衬底温度、溅射氧气压等工艺参数有很大关系，ITO薄膜的SEM表明，样品表面较平整，且晶粒也比较致密。