It can be concluded that the combined intensity between films and substrates is improved by ultrasonic pre-treating of substrates which also accelerates the nucleation of BN.

• 实验发现：对衬底进行超声预处理，在一定程度上可以增大薄膜与衬底结合强度，同时还可以促进氮化硼的形核，提高氮化硼薄膜的生长速度。