Ion species and their energy in the cathode sheath of N 2 abnormal glow discharges with short electrode interval were determined by molecular beam mass spectrometry (MBMS).

• 利用国内首台三级差分抽空的分子束质谱装置；对短间隙氮异常辉光放电阴极鞘层区正离子组分及能量分布进行了诊断研究.