Influence of gas pressure on the content of non-diamond phase carbon in diamond films, grown in CH4/H2 gas mixture by microwave plasma chemical vapor deposition (MWPCVD),was studied.

• 在水冷反应室式MWPCVD装置中以CH4和H2为反应气体进行了金刚石膜的沉积实验，研究了反应气体的压强对金刚石膜中非金刚石碳相含量的影响。