In this paper,investigations of the pulse discharge for PEOMCVD of hard coatings are carried out. The vickers hardness, thickness, structure and components of the coatings are analysed.

• 研究了用直流脉冲等离子体进行PEOMCVD(等离子体增强金属有机化合物化学气相沉积)淀积含钛多组元化合物硬质膜的新工艺。对试样进行了显微硬度、涂层厚度、表面结构及膜的元素成份分析。