In this paper, the ways used to preparing the nano multilayers are systematically summarized, including electro-deposition, PVD and CVD, sol-gel, self-assembly and other technologies.

• 阐述了多种纳米多层膜的制备方法，主要包括电化学沉积法、物理和化学气相沉积法、溶胶-凝胶法、组装技术以及其它制备技术。