In the multilevel metalization techniques of the ULSI, the feature size is more and more smaller, so the wire become thinner and thinner.

• 甚大规模集成电路多层布线工艺中,随着特征尺寸的降低,金属线变得更细、互连层数变得更多。在互连线中我们把铝用作金属化系统的第一层金属变得越来越普遍。