In paper effect of oxygen and carbon action on minority carrier lifetime in thermal process of mc-Si cell and properties of Si_3N_4 film and effects of antirefle-ction and passivation were studied.

 
  • 为此本文重点研究了多晶硅片在电池制造热工艺中氧碳的行为及其对少子寿命的影响;并研究了氮化硅薄膜的性能及对多晶硅电池的减反射及钝化作用。
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