In order to overcome the misalignment between SIL/SSIL and nano-aperture, a self-alignment technique based on self-modulation by surface tension during thermal reflowing process is proposed.

• 为了克服对准误差，本研究提出一种自我对准技术，其方法是利用在热回流制程中表面张力所自行产生的自我调整机制。