In 1978, John H. Clark at Los Alamos Scientific Laboratories for the first time removed the common impurities of silane, such as phosphine (PH3) and arsine (AsH3), by irradiating the silane gas with a pulsed ultraviolet laser.

• 1978年，洛斯阿拉莫斯科学实验室的克拉克(John h.；Clark)第一次通过用脉冲紫外激光照射硅烷气体的办法，除去硅烷中象磷化氢(Ph3)和砷化三氢(Ash3)这类普通杂质。