Imaging quality of a single mirror and two mirrors in the case of grazing incidence is discussed.The focal length, field obliquity and diaphragm position of KBA microscope are analyzed.

• 详细分析掠入射情况下单镜及双反射镜的成像特性，对组成KBA显微镜的反射镜在掠入射条件下的焦距、视场倾斜、光阑位置等进行研究。