Focusing on the problem such as slow scanning speed, complex system design and low light efficiency, a simple method to obtaining optical sectioning in multiple-beam confocal measurement was proposed.

 
  • 摘要针对共焦测量中单点扫描速度慢、机构复杂、光能利用率低的问题,介绍了一种利用结构光和共焦显微术相结合来实现多光束测量的新方法。
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