Finally, check design rules which is provided by foundry SMIC, including DRC, LVS, and ERC and fix all of violations. And fix poly density violations.

 
  • 最后,根据中芯国际提供的设计规则文件,对最终的版图进行包括DRC、LVS、ERC 的设计规则检查并修复故障,并对存在的多晶硅密度不足的规则违反提出修改方法。
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