Ferroelectrics|Silicon Microelectronic Integrated System (FSMIS) is a product of combination of ferroelctric materials and silicon techniques. It has great meaning for the Microelectro|mechanical System (MEMS), memory and many other important fields.
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- 铁电 -硅微集成系统 ( FSMIS)是铁电材料与硅工艺相结合的产物 ;在微电子机械系统( MEMS) ;存储器等多方面具有极为重要的应用价值 .