Fabrication of high quality diamondlike carbon(DLC)films has long been plagued by the large level of accumulated internal compressives stresses,which leads to serious adhesion concerns.

• 长期以来,高质量的纯类金刚石薄膜的成功制备一直受其巨大内部压应力的阻碍,因为这种压应力导致严重的附着问题。