Fabricating the nanoporous sil icon membrane with nanotechnology and Bio-MEMS technology,the thickness of memb rane,pore size and distribution , geometry shape and porosity can precisely con trolled.

• 采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜,可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。