FSG production process is similar as BPSG process, and it only In-situ doping F, when product SiO2 layer.

• FSG薄膜其成长方式就像硼磷硅酸玻璃(BPSG)的制程一样，只不过是在成长SiO2的同时，内部掺入(In-situ doping)含有氟的物质。