Experimental results show that a noticeably enhanced size of the single-grain, up to tens of micrometer can be obtain in the MILC poly-Si after a high temperature annealing step.

 
  • 实验结果发现:高温退火处理可促使MILC多晶硅产生显著的2次结晶,从而使得晶粒尺寸显著增大,甚至可达数十微米。
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