Etching Area: Etching is to remove the redundancy electric pattern on wafer surface by chemical or physical method. The area where etching is implemented is called Etch Area.

• 蚀刻区：用化学或物理方法将预先覆盖在晶圆表面上电路图案的多余部分移除的方式称为蚀刻，进行该步骤的区域即为蚀刻区。