Ellipsometer is widely used in the field of studying the thickness, refracive index, extinction coefficient of the multilayer film and some optical properties of graded layer are also given.

• 主要研究变角度变波长椭圆偏振仪测量多层膜每层膜厚和光学特性,并给出了光学梯度薄膜的梯度特性。