Electrostatic combs,exciting the tines to vibrate laterally in antiphase in the plane of the wafer,and detecting the vibrating frequency in the meantime,are mounted on the two tines of fork.

• 它在音叉的两个臂上连接了梳齿电容结构，用来驱动音叉臂在硅片平面内侧向、反相振动，同时检测音叉的振动频率。