Conventionally, this involves coating a silicon wafer with a thin layer of light-sensitive polymer, shining UV light onto it through a template, and then dissolving the affected areas to create a pattern.

• 和传统方法一样，先给硅片薄薄地涂上一层对光线十分敏感的聚合物，再隔着一个模板用紫外线照射硅片，然后溶解那些受到影响的区域，这样就制成了一个图案。