Comparing with direct ion implantation, the cost of equipment of IBBM is only half or a quarter of that of implanter and the productivity can be increased by 1-2 order.是什么意思_Comparing with direct ion implantation, the cost of equipment of IBBM is only half or a quarter of that of implanter and the productivity can be increased by 1-2 order.在线翻译_英语_读音_用法_例句