Comparing with different chemical etchant, FPM(HF-H2O2-H2O Mixing) can reach a high selectivity of Sion/SiO2.

• 通过不同腐蚀药液的比较，结果表明，FPM(HF- H2O2-H2O混合液)能够达到氮氧化硅对氧化硅较高的选择比。